Fabrication of phase masks from amorphous carbon thin films for electron-beam shaping

• Lukas Grünewald,
• Dagmar Gerthsen and
• Simon Hettler

Beilstein J. Nanotechnol. 2019, 10, 1290–1302, doi:10.3762/bjnano.10.128

• ; Bessel beam; electron-beam shaping; nanofabrication; vortex beam; Introduction The possibility to shape electron beams has gained much interest since the first observation of electron vortex beams, i.e., beams that carry a defined orbital angular momentum [1][2][3]. Various other beam shapes, e.g., non

• deviations from the desired form because the ideally sharp edges are significantly rounded due to the finite diameter of the ion beam. Application of phase masks Bessel beam phase mask in object plane PMs were first investigated as conventional samples in the object plane of a TEM which allows for a detailed